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MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)

MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)Author: P. Rai-Choudhury
Creator: P. Rai-Choudhury
Publisher: SPIE Publications
Category: Book

List Price: $95.00
Buy New: $59.99
as of 5/28/2012 17:28 EDT details
You Save: $35.01 (37%)

In Stock


New (8) Used (11) from $30.00

Sales Rank: 3,022,358

Languages: English (Unknown), English (Original Language), English (Published)
Media: Hardcover
Pages: 528
Number Of Items: 1
Shipping Weight (lbs): 0
Dimensions (in): 10.2 x 7.2 x 1.4

ISBN: 0819437166
EAN: 9780819437167
ASIN: 0819437166

Publication Date: December 1, 2000
Availability: Usually ships in 1-2 business days



Editorial Reviews:

Product Description
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.

Contents

- Preface
- MEMS/MOEMS Technology Capabilities and Trends
- Operation and Design of MEMS/MOEMS Devices
- Optical Microsystem Modeling and Simulation
- The Digital Micromirror Device: A Micro-Optical Electromechanical Device for Display Applications
- Optical Waveguides and Silicon-Based Micromachined Architectures
- Silicon Micromachines in Optical Communications Networks: Tiny Machines for Large Systems
- Assembly and Test for MEMS and Optical MEMS
- MEMS, Microsystems, Micromachines: Commercializing an Emergent Disruptive Technology
- Index




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