| MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85) |  | Author: P. Rai-Choudhury Creator: P. Rai-Choudhury Publisher: SPIE Publications Category: Book
List Price: $95.00 Buy New: $59.99 as of 5/28/2012 17:28 EDT details You Save: $35.01 (37%)
New (8) Used (11) from $30.00
Sales Rank: 3,022,358
Languages: English (Unknown), English (Original Language), English (Published) Media: Hardcover Pages: 528 Number Of Items: 1 Shipping Weight (lbs): 0 Dimensions (in): 10.2 x 7.2 x 1.4
ISBN: 0819437166 EAN: 9780819437167 ASIN: 0819437166
Publication Date: December 1, 2000 Availability: Usually ships in 1-2 business days
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| Editorial Reviews:
Product Description Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.Contents - Preface - MEMS/MOEMS Technology Capabilities and Trends - Operation and Design of MEMS/MOEMS Devices - Optical Microsystem Modeling and Simulation - The Digital Micromirror Device: A Micro-Optical Electromechanical Device for Display Applications - Optical Waveguides and Silicon-Based Micromachined Architectures - Silicon Micromachines in Optical Communications Networks: Tiny Machines for Large Systems - Assembly and Test for MEMS and Optical MEMS - MEMS, Microsystems, Micromachines: Commercializing an Emergent Disruptive Technology - Index
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